ILLUMINATION OPTICAL SYSTEM MODULE FOR EXPOSURE APPARATUS

摘要

The present invention relates to an LED illumination optical system module formed in an exposure apparatus used for manufacturing a semiconductor substrate and a flat plate display substrate. An LED illumination optical system according to the present invention includes a substrate; LED devices arranged on the substrate; a lens module which makes parallel light emitted from each of the LED devices; and a focusing lens which focuses light paralleled by the lens module. The lens module includes a first lens array which has first lenses which firstly parallelize light emitted from each of the LED device; a second lens array which has second lenses which secondarily parallelize the firstly parallelized light of each lens; and a module frame which fixes the first lens array and the second lens array to the LED device. The present invention provides an LED illumination optical system module capable of consuming low power and increasing energy efficiency by easily replacing an existing arc lamp while using an existing exposure device, and a light source for an exposure apparatus having the same.