MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

The present invention relates to a method for manufacturing an array substrate for a liquid crystal display device which uniformly etches an amorphous silicon (n+ a-Si:H) thin film including an amorphous silicon (a-Si:H) thin film and impurities, by using a composite of an etchant comprising, with respect to the total weight, 5-40 wt% of fluoropolymer composite, 5-20 wt% of hydrogen peroxide, 3-20 wt % of inorganic acid, and the remainder cconsisting of water.