| 发明名称 |
NANOMETER SIZED STRUCTURES GROWN BY PULSED LASER DEPOSITION |
| 摘要 |
Nanometer sized materials can be produced by exposing a target to a laser source to remove material from the target and deposit the removed material onto a surface of a substrate to grow a thin film in a vacuum chamber |
| 申请公布号 |
US2015280017(A1) |
申请公布日期 |
2015.10.01 |
| 申请号 |
US201314439655 |
申请日期 |
2013.10.29 |
| 申请人 |
KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY |
发明人 |
El Zein Basma;Yao Yingbang;Dogheche Elhadje;Boulfrad Samir;Jabbour Ghassan |
| 分类号 |
H01L31/0296;C01G9/02;H01L31/18 |
主分类号 |
H01L31/0296 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for producing nanometer sized materials comprising exposing a target to a laser source to remove material from the target and deposit the removed material onto a surface of a substrate to grow a thin film in a vacuum chamber at a pressure of between 10 mTorr and 500 mTorr. |
| 地址 |
Thuwal, SA |
