发明名称 WAFER PACKAGE PROCESS
摘要 A wafer package process includes the following steps. A wafer with a plurality of first dies is provided. A plurality of second dies are bonded on the first dies by using flip chip technology, wherein the size of the first die is larger than that of the second die. A molding material is formed to entirely cover the second dies and the wafer. A through via is formed in the molding material. A conductive material is formed to fill the through via onto the molding material.
申请公布号 US2015279829(A1) 申请公布日期 2015.10.01
申请号 US201414226802 申请日期 2014.03.26
申请人 UNITED MICROELECTRONICS CORP. 发明人 Kuo Chien-Li
分类号 H01L25/00;H01L23/00;H01L21/78;H01L21/56;H01L21/311;H01L25/065;H01L21/768 主分类号 H01L25/00
代理机构 代理人
主权项 1. A wafer package process, comprising: providing a wafer with a plurality of first dies; bonding a plurality of second dies on the first dies by using flip chip technology, wherein the size of the first die is larger than that of the second die; forming a molding material to entirely cover the second dies and the wafer; forming a through via in the molding material; and forming a conductive material filling the through via as well as onto the molding material.
地址 Hsin-Chu City TW