| 发明名称 |
COMPOSITE SEAL |
| 摘要 |
The composite seal includes a metal member arranged on a first substrate side and an elastic member arranged on a second device side and capable of elastic deformation. The composite seal having a structure capable of suppressing degradation even with ultraviolet radiation is thus provided. |
| 申请公布号 |
US2015279706(A1) |
申请公布日期 |
2015.10.01 |
| 申请号 |
US201314433306 |
申请日期 |
2013.09.25 |
| 申请人 |
NIPPON VALQUA INDUSTRIES, LTD. |
发明人 |
Nakagawa Ippei |
| 分类号 |
H01L21/67;F16J15/10;F16J15/08 |
主分类号 |
H01L21/67 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A composite seal for use in semiconductor manufacturing equipment including a first device in which a substrate is arranged and a plate-like second device arranged to face the first device to allow passage of ultraviolet rays, the composite seal being arranged so as to surround a periphery of the substrate and held between the first device and the second device to be elastically deformed to hermetically separate a space on one surface side of the second device from a space on the other surface side, the composite seal comprising:
a metal member arranged on the first device side; and an elastic member arranged on the second device side and capable of elastic deformation. |
| 地址 |
Tokyo JP |
