发明名称 VACUUM FURNACE
摘要 A vacuum furnace. The vacuum furnace comprises a furnace body (11), an evaporation source (A), an object hanging frame (14) used for placing a plated object (B), and a rotary table (C) used for placing and moving the object hanging frame (14). A bottom plate (111), an outer wall (112), an inner wall (113) and a top plate of the furnace body (11) together define a sealed space (S). The furnace body (11) also comprises a first baffle (17) and a second baffle (18). A certain distance is arranged between the first baffle (17) and the second baffle (18) and the first baffle (17) and the second baffle (18) divide the sealed space into a first partition space (S1) and a second partition space (S2). The vacuum furnace can eliminate instantaneously generated oxygen substances and prevent the surface of the plated object from being polluted by the oxygen substances, so as to prevent the plated object from generating pseudo attachments, thereby improving the stability of product quality.
申请公布号 WO2015143681(A1) 申请公布日期 2015.10.01
申请号 WO2014CN74229 申请日期 2014.03.27
申请人 SUNG, YU-CHI 发明人 SUNG, YU-CHI;SUNH, SHIH-YUAN
分类号 C23C14/24 主分类号 C23C14/24
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