发明名称 |
METHOD FOR PRODUCING ULTRA-THIN TUNGSTEN LAYERS WITH IMPROVED STEP COVERAGE |
摘要 |
A tungsten nucleation film is formed on a surface of a semiconductor substrate by alternatively providing to that surface, reducing gases and tungsten-containing gases. Each cycle of the method provides for one or more monolayers of the tungsten film. The film is conformal and has improved step coverage, even for a high aspect ratio contact hole. |
申请公布号 |
US2015279732(A1) |
申请公布日期 |
2015.10.01 |
申请号 |
US201514738685 |
申请日期 |
2015.06.12 |
申请人 |
Novellus Systems, Inc. |
发明人 |
Lee Sang-Hyeob;Collins Joshua |
分类号 |
H01L21/768;H01L21/285 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
1. A method of forming a tungsten nucleation layer a surface of a semiconductor substrate comprising the steps of:
positioning said semiconductor substrate at a deposition station within a deposition chamber; heating said semiconductor substrate to a temperature between approximately 250 to 475° C. at said deposition station; performing an initiation soak step, which consists of exposure of the substrate to a gas in a gaseous or plasma state for about 2 to about 60 seconds; flowing a reducing gas into said deposition chamber whereby about one or more monolayers of reducing gas are deposited onto said surface of said substrate; purging the reducing gas from the deposition chamber; and flowing a tungsten-containing gas into said deposition chamber, whereby said deposited reducing gas is substantially replaced by tungsten to provide said nucleation layer. |
地址 |
Fremont CA US |