| 摘要 |
The present disclosure discusses a power delivery system, and methods of operation, configured to monitor characteristics of a generator, a match network, and a plasma load, via one or more sensors, and control these components via a local controller in order to improve power delivery accuracy and consistency to the plasma load. Control can be based on a unified monitoring of power characteristics in the power delivery system as well as variations between components and even non-electrical characteristics such as plasma density, end point, and spectral components of plasma light emission, to name a few. |
| 主权项 |
1. A power delivery system comprising:
a generator configured to provide power to a plasma load; a match network configured to impedance match an output of the generator to the plasma load; a first sensor configured to measure at least one of voltage, current, phase, impedance, or power of the power at an output of the generator, and configured to generate a corresponding measured voltage, current, phase, impedance, or power; and a local controller configured to:
receive the measured voltage, current, phase, impedance, and/or power from the sensor;receive a user power delivery requirement;analyze the at least one of measured voltage, current, phase, impedance, and power as well as the user power delivery requirement;instruct the generator, the match network, or both the generator and the match network, to adjust one or more operating parameters in order to meet the user power delivery requirements; andidentify the generator, the match network, and the first sensor. |
