OPTICAL MEMBRANE ELEMENT HAVING A LONGITUDINALLY ADJUSTABLE CONNECTING ELEMENT

摘要

An optical membrane element for an optical device in lithography, especially EUV (extreme ultraviolet) lithography, includes at least one membrane layer and a frame, which at least partially surrounds the membrane layer and at which at least part of the rim of the membrane layer is mounted. At least one tautening element is provided, which facilitates tautening of the membrane layer and wherein the optical membrane element can be used in a projection exposure system, especially for EUV lithography, such that the membrane layer of the membrane element can be adjustably tautened, such that the membrane layer is flat. A method for manufacturing a corresponding optical membrane element includes generating a tautening element lithographically together with the membrane layer.

主权项

1. An optical membrane element, comprising:
a membrane layer having a rim; a frame at least partially surrounding the membrane layer, at least part of the rim of the membrane layer being mounted to the frame; a tautening element configured to facilitate tautening of the membrane layer; and a holder in which the frame is accommodated, wherein:
the tautening element comprises a longitudinally adjustable connecting element between the frame and the holder;a tension of the longitudinally adjustable connecting element is adjustable by changing a length of the longitudinally adjustable connecting element;the longitudinally adjustable connecting element is an adjusting screw or a piezo actutator; andthe optical membrane element is configured to be used in microlithography.