发明名称 MANUFACTURING METHOD OF MASK PLATE FOR SHIELDING DURING SEALANT-CURING
摘要 A manufacturing method of a mask plate for shielding during sealant-curing includes: forming a negative photoresist light-shielding material layer on a transparent substrate; with a color-filter mask plate set, exposing the substrate formed with the negative photoresist light-shielding material layer; developing the substrate after exposing to form the pattern of the mask plate. The method does not require separate fabrication of a mask plate, thereby significantly reducing the manufacturing costs of the mask plate for shielding during sealant-curing.
申请公布号 US2015277226(A1) 申请公布日期 2015.10.01
申请号 US201314361763 申请日期 2013.06.14
申请人 BOE TECHNOLOGY GROUP CO., LTD. ;HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. 发明人 Liu Yong;Li Xiaohe;Li Hongmin;Shao Xianjie;Jiang Qinghua
分类号 G03F7/20;G03F7/40 主分类号 G03F7/20
代理机构 代理人
主权项 1. A manufacturing method of a mask plate for shielding during sealant-curing, comprising: forming a negative photoresist light-shielding material layer on a transparent substrate; exposing the substrate formed with the negative photoresist light-shielding material layer with a color-filter mask plate set; and developing the substrate after exposing to form the pattern of the mask plate.
地址 Beijing CN