| 摘要 |
An ultrasonic washing apparatus for a large area panel is disclosed. According to the present invention, the ultrasonic washing apparatus for a large area panel comprises: a frame having a plurality of transfer rollers to horizontally transfer a large area panel; an ultrasonic vibration unit lengthily formed in a longitudinal direction to be same as or larger than a width of the transferred panel, wherein both ends are individually fixated on both sides of the frame by means of a coupling means; and an ultrasonic washing machine having a washing liquid supply unit to supply washing liquid between the ultrasonic vibration unit and the panel, supplying washing liquid to a surface of the transferred panel to form a water film, and applying ultrasonic waves to the water film to wash a surface of the panel. The ultrasonic vibration unit comprises: a vibration block wherein an ultrasonic vibrator is arranged; and a wave guide wherein an upper end surface is coupled to a bottom surface of the vibration block, a lower end surface facing a surface of the panel is provided in a lower end, and a reflective surface reflecting ultrasonic waves passing through the upper end surface to be expanded in the lower end surface is formed to be inclined in one side between the upper end surface and the lower end surface. According to the present invention, after ultrasonic waves generated in the ultrasonic vibrator is reflected on the reflective surface, the ultrasonic waves are uniformly diffused and expanded in the lower end surface corresponding to a surface of the panel, thereby improving uniformity to improve washing performance. |
