发明名称 |
递送装置、其制造方法及包含该装置之物品;DELIVERY DEVICE, METHODS OF MANUFACTURE THEREOF AND ARTICLES COMPRISING THE SAME |
摘要 |
本文揭示的是一种递送装置,其包含腔室;进气口;出气口;以及含纳于腔室内并具有上部及下部的液浸管,液浸管的上部与进气口流体连通并起允许载送气体进入的作用;液浸管的下部伸入腔室,液浸管的下部终端为出口端;以及套筒;其中套筒具有第一端及第二端;第一端与液浸管的下部紧配;并且其中套筒受到扰动时振动。; a gas inlet; a gas outlet; and a dip tube contained within the chamber and having an upper portion and a lower portion, the upper portion of the dip tube being in fluid communication with the gas inlet and being operative to permit the entry of a carrier gas; the lower portion of the dip tube extending into the chamber, the lower portion of the dip tube terminating in an outlet end; and a sleeve; where the sleeve has a first end and a second end; the first end being in an interference fit with the lower portion of the dip tube; and where the sleeve vibrates upon being subjected to a disturbance. |
申请公布号 |
TW201536949 |
申请公布日期 |
2015.10.01 |
申请号 |
TW104101446 |
申请日期 |
2015.01.16 |
申请人 |
罗门哈斯电子材料有限公司 ROHM AND HAAS ELECTRONIC MATERIALS LLC |
发明人 |
渥克 艾格伯特 WOELK, EGBERT;迪卡洛 郎洛德L DICARLO, RONALD L.;雪奈卡卡提 德欧达塔 凡娜亚 SHENAI-KHATKHATE, DEODATTA VINAYAK |
分类号 |
C23C16/455(2006.01);C23C16/54(2006.01) |
主分类号 |
C23C16/455(2006.01) |
代理机构 |
|
代理人 |
洪武雄陈昭诚 |
主权项 |
|
地址 |
美国 US |