| 发明名称 |
END EFFECTOR PADS |
| 摘要 |
An end effector pad including a fence member, a first recessed support member extending from a first side of the fence member, a second recessed support member extending from a second side of the fence member opposite the first side, a first glass plate having a relatively low coefficient of friction disposed on top of the first recessed support member for supporting a substrate thereon, and a second glass plate having a relatively low coefficient of friction disposed on top of the second recessed support member for supporting a substrate thereon. |
| 申请公布号 |
US2015279720(A1) |
申请公布日期 |
2015.10.01 |
| 申请号 |
US201414291982 |
申请日期 |
2014.05.30 |
| 申请人 |
Varian Semiconductor Equipment Associates, Inc. |
发明人 |
Pergande Paul E.;Carlson Charles T.;Senior Krag R. |
| 分类号 |
H01L21/687 |
主分类号 |
H01L21/687 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An end effector pad comprising:
a fence member; a recessed support member extending from a first side of the fence member; and a plate disposed on top of the recessed support member for supporting a substrate thereon. |
| 地址 |
Gloucester MA US |
