发明名称 METHOD OF SELECTIVELY ETCHING A METAL LAYER FROM A MICROSTRUCTURE
摘要 The invention relates to a method of etching a portion of a metal layer of a microstructure comprised of the metal layer disposed on a transparent conducting oxide (TCO) layer, and in particular, to selectively etching the portion of the metal layer and not the TCO layer.
申请公布号 WO2015147984(A1) 申请公布日期 2015.10.01
申请号 WO2015US13676 申请日期 2015.01.30
申请人 3M INNOVATIVE PROPERTIES COMPANY 发明人 SEBASTIAN, MUTHU
分类号 G06F3/041 主分类号 G06F3/041
代理机构 代理人
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