METHOD OF MANUFACTURING CERAMIC SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a ceramic substrate which is capable of suppressing warp of the ceramic substrate and eliminating productivity decline even during manufacturing of a crystal device in a wafer level package.SOLUTION: A method of manufacturing a ceramic substrate includes firing a ceramic substrate in a molded state under temperature conditions that a fired ceramic substrate is recrystallized. The temperature conditions include: raising temperature preferably from normal temperature to 1450 degrees for approximately 15 hours; holding the temperature at 1450 degrees for approximately 2 hours; and lowering the temperature from 1450 degrees to normal temperature for 45 hours or more.