| 摘要 |
PROBLEM TO BE SOLVED: To improve polishing quality of a plate-like body by preventing the separation of an intermediate sheet relative to a film body.SOLUTION: In a unit sheet 230 of a polishing device, an elastic sheet 220 which is deformed by following a deformation in a sliding direction and a deformation in a pressurizing direction of a film body 38 is interposed between an intermediate sheet 210 and the film body 38. The film body 38 having rigidity in the sliding direction and rigidity in the pressurizing direction that are lower than the intermediate sheet 210 expands and contracts to be deformed by polishing resistance generated during the polishing of a glass plate G, and an end edge part 220A of the elastic sheet 220 is elastically deformed by following the deformation of the film body 38. Since the intermediate sheet 210 with rigidity higher than the film body 38 is less likely to expand and contract by the polishing resistance and is less likely to be deformed, a relative deviation is not generated between the intermediate sheet 210 and the elastic sheet 220. Since the elastic sheet 220 is not separated from the film body 38, and the elastic sheet 220 is not separated from the intermediate sheet 210, the separation of the intermediate sheet 210 from the film body 38 can be prevented. |
