| 发明名称 |
GAS SUPPLY PIPE, AND GAS TREATMENT EQUIPMENT |
| 摘要 |
According to one embodiment, a gas supply pipe has a first gas pipe configured to blow a gas which has flowed from an inflow opening via first gas blow holes arranged along a longitudinal direction, and a second gas pipe provided in parallel with the first gas pipe. The second gas pipe has second gas blow holes arranged along the longitudinal direction, and allows the gas to flow in a direction opposite to the first gas pipe. |
| 申请公布号 |
US2015275369(A1) |
申请公布日期 |
2015.10.01 |
| 申请号 |
US201514643165 |
申请日期 |
2015.03.10 |
| 申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
TERADA Takahiro;MATSUDA Takuya;DEURA Kaori;TANAKA Masayuki;WATASE Aya |
| 分类号 |
C23C16/455 |
主分类号 |
C23C16/455 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A gas supply pipe comprising:
a first gas pipe having an inflow opening into which a gas flows and having first gas blow holes arranged apart from one another along a longitudinal direction; and a second gas pipe provided in parallel with the first gas pipe, the second gas pipe having second gas blow holes arranged apart from one another along the longitudinal direction, and allowing the gas to flow in a direction opposite to the first gas pipe. |
| 地址 |
Minato-ku JP |
