发明名称 ANGULAR VELOCITY SENSOR, DRIVING CIRCUIT AND DRIVING METHOD FOR SAME, AND ANGULAR VELOCITY DETECTION SENSOR DEVICE
摘要 This angular velocity sensor driving circuit is an oscillation controller (5) for oscillating an angular velocity sensor unit (3) that has drive electrodes (D1, D2), detection electrodes (X1…), and an oscillator (3a), the circuit being provided with: a square wave generator (5b) for generating an oscillation start signal; a self-oscillation circuit (5a) for generating an excitation signal on the basis of a detection signal from the detection electrodes (X1…); a switching circuit (5c) for outputting an oscillation start signal to the drive electrodes (D1, D2) during an oscillation start interval in which oscillation by the oscillator (3a) starts, and outputting an excitation signal to the drive electrodes (D1, D2) during an angular velocity detection interval in which angular velocity is detected; a controller (5f) for controlling the switching circuit (5c) in such a way that the oscillation start interval and the angular velocity detection interval are repeated; and a sequencer (5e) for regulating the energy of the oscillation start signal that will be presented to the drive electrodes (D1, D2) during the next oscillation start interval, doing so on the basis of the amplitude, or the amount of fluctuation in amplitude, of the detection signal or the excitation signal during the angular velocity detection interval.
申请公布号 WO2015146165(A1) 申请公布日期 2015.10.01
申请号 WO2015JP01693 申请日期 2015.03.25
申请人 ASAHI KASEI MICRODEVICES CORPORATION 发明人 SAWADA, KAZUSHIGE;YAMANAKA, YUUKI;MASUI, YOSHIHIRO
分类号 G01C19/5776;G01C19/56 主分类号 G01C19/5776
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