发明名称 THIN FILM TRANSISTOR ARRAY PANEL AND MANUFACTURING METHOD THEREOF
摘要 The present invention provides a thin film transistor which includes a substrate, a first gate electrode which is located on the substrate, a gate insulation layer which is located on the gate electrode, a semiconductor which is located on the gate dielectric layer, an etch stopper which is located on a channel of the substrate, a source electrode and a drain electrode which are located on the semiconductor and face each other around the first gate electrode, and a second gate electrode which is located on the channel of the semiconductor as the same layer as the source electrode and the drain electrode. The second gate is electrically separated from the source electrode and the drain electrode. According to the present invention, a threshold voltage (Vth) is uniformized by preventing the inflow of hydrogen (H) to the channel through a double gate structure. A thin film transistor display plate is manufactured through a simple manufacturing process.
申请公布号 KR20150109009(A) 申请公布日期 2015.10.01
申请号 KR20140031848 申请日期 2014.03.18
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 SONG, JUN HO
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
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