发明名称 压力感测器;PRESSURE SENSOR
摘要 根据一实施例,本发明揭示一种压力感测器,其包含一支撑区段、一膜区段及一应变感测元件。该膜区段由该支撑区段支撑且可变形。该膜区段包含一第一膜及一第二膜。该第一膜包含位于一部分中之一第一区域及位于围绕该第一区域之一周边部分中之一第二区域。该第二膜设置于该第一区域上。该应变感测元件设置于该第二区域之部分上。该应变感测元件包含一第一磁性层、一第二磁性层及一中间层。该第一磁性层之磁化回应于该第二区域之变形而改变。该中间层设置于该第一磁性层与该第二磁性层之间。; a film section; and a strain sensing element. The film section is supported by the support section and deformable. The film section includes a first film and a second film. The first film includes a first region located in a central part and a second region located in a peripheral part around the first region. The second film is provided on the first region. The strain sensing element is provided on part of the second region. The strain sensing element includes a first magnetic layer; a second magnetic layer; and an intermediate layer. Magnetization of the first magnetic layer changes in response to deformation of the second region. The intermediate layer is provided between the first magnetic layer and the second magnetic layer.
申请公布号 TW201537155 申请公布日期 2015.10.01
申请号 TW103146133 申请日期 2014.12.29
申请人 东芝股份有限公司 KABUSHIKI KAISHA TOSHIBA 发明人 冈本和晃 OKAMOTO, KAZUAKI;福泽英明 FUKUZAWA, HIDEAKI;藤庆彦 FUJI, YOSHIHIKO;汤泽亚希子 YUZAWA, AKIKO;堀昭男 HORI, AKIO;增西桂 MASUNISHI, KEI
分类号 G01L7/08(2006.01);G01L9/16(2006.01) 主分类号 G01L7/08(2006.01)
代理机构 代理人 陈长文
主权项
地址 日本 JP