发明名称 |
DEPOSITION SYSTEM WITH MULTI-CATHODE AND METHOD OF MANUFACTURE THEREOF |
摘要 |
A deposition system, and a method of operation thereof, includes: a cathode; a shroud below the cathode; a rotating shield below the cathode for exposing the cathode through the shroud and through a shield hole of the rotating shield; and a rotating pedestal for producing a material to form a carrier over the rotating pedestal, wherein the material having a non-uniformity constraint of less than 1% of a thickness of the material and the cathode having an angle between the cathode and the carrier. |
申请公布号 |
US2015279635(A1) |
申请公布日期 |
2015.10.01 |
申请号 |
US201514606367 |
申请日期 |
2015.01.27 |
申请人 |
Applied Materials, Inc. |
发明人 |
Subramani Anantha K.;Jadhav Deepak;Goel Ashish;Wu Hanbing;Kothnur Prashanth;Ching Chi Hong |
分类号 |
H01J37/34;C23C14/35 |
主分类号 |
H01J37/34 |
代理机构 |
|
代理人 |
|
主权项 |
1. A method of operation of a chamber comprising:
adjusting a cathode; rotating a rotating shield below the cathode for exposing the cathode through a shroud below the cathode and through a shield hole of the rotating shield; and rotating a rotating pedestal for producing a material to form a carrier over the rotating pedestal, wherein the material having a non-uniformity constraint of less than 1% of a thickness of the material and the cathode having an angle between the cathode and the carrier. |
地址 |
Santa Clara CA US |