发明名称 DEPOSITION SYSTEM WITH MULTI-CATHODE AND METHOD OF MANUFACTURE THEREOF
摘要 A deposition system, and a method of operation thereof, includes: a cathode; a shroud below the cathode; a rotating shield below the cathode for exposing the cathode through the shroud and through a shield hole of the rotating shield; and a rotating pedestal for producing a material to form a carrier over the rotating pedestal, wherein the material having a non-uniformity constraint of less than 1% of a thickness of the material and the cathode having an angle between the cathode and the carrier.
申请公布号 US2015279635(A1) 申请公布日期 2015.10.01
申请号 US201514606367 申请日期 2015.01.27
申请人 Applied Materials, Inc. 发明人 Subramani Anantha K.;Jadhav Deepak;Goel Ashish;Wu Hanbing;Kothnur Prashanth;Ching Chi Hong
分类号 H01J37/34;C23C14/35 主分类号 H01J37/34
代理机构 代理人
主权项 1. A method of operation of a chamber comprising: adjusting a cathode; rotating a rotating shield below the cathode for exposing the cathode through a shroud below the cathode and through a shield hole of the rotating shield; and rotating a rotating pedestal for producing a material to form a carrier over the rotating pedestal, wherein the material having a non-uniformity constraint of less than 1% of a thickness of the material and the cathode having an angle between the cathode and the carrier.
地址 Santa Clara CA US