LiCoO2 SPUTTERING TARGET, PRODUCTION METHOD THEREFOR, AND POSITIVE ELECTRODE MATERIAL THIN FILM

摘要

Provided is a LiCoO2 sputtering target that comprises a LiCoO2 composition and that is characterized by having a resistivity of 100 Ωcm or less and a relative density of 80% or more. The sputtering target is useful for forming a positive electrode material thin film in all-solid-state thin film lithium ion secondary batteries that are mounted to automobiles or used in information communication devices, household devices, and the like.