摘要 |
A differential transformer magnetic permeability sensor includes a substrate, a drive coil, a first differential coil, a second differential coil, a first interconnection pattern, and a second interconnection pattern. The first differential coil is disposed at a side of a first surface of the substrate, and an induced voltage is generated therein when the drive coil is driven. The second differential coil is disposed at a side of a second surface of the substrate, and an induced voltage is generated therein when the drive coil is driven. The first interconnection pattern is located on the first surface and allows the first differential coil to serve as a reference coil, and the second differential coil as a sensing coil. The second interconnection pattern is located on the second surface and allows the second differential coil to serve as a reference coil, and the first differential coil as a sensing coil. |