| 发明名称 |
LIGHT TRANSMISSION DEVICE AND METHOD FOR SEMICONDUCTOR MANUFACTURING PROCESS |
| 摘要 |
A light transmission device is provided. The light transmission device includes a light source, a light transmission module and at least one light regulator. The light transmission module transmits a portion of the light of the light source for implementing a first semiconductor manufacturing process over the wafer. The light source is utilized to implement a second semiconductor manufacturing process over a wafer. The first semiconductor manufacturing process is different from the second semiconductor manufacturing process. The at least one light regulator regulates the light of the light transmission module transmitted to the wafer. |
| 申请公布号 |
US2015277231(A1) |
申请公布日期 |
2015.10.01 |
| 申请号 |
US201414229026 |
申请日期 |
2014.03.28 |
| 申请人 |
Taiwan Semiconductor Manufacturing Co., Ltd |
发明人 |
LI Yan-Ping |
| 分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A light transmission device, comprising:
a light source, arranged in a first process room; and a light transmission module, configured to transmit a portion of the light of the light source to a second process room for implementing a first semiconductor manufacturing process over a wafer, wherein the second process room is different from the first process room. |
| 地址 |
Hsin-Chu TW |
