发明名称 |
POLISHING AGENT COMPOSITION AND METHOD FOR POLISHING MAGNETIC DISK SUBSTRATE |
摘要 |
Provided is a polishing agent composition which enables both the achievement of high polishing rate and the achievement of good surface smoothness at the same time without using alumina particles. A polishing agent composition which contains a colloidal silica having an average particle diameter of 5-200 nm and pulverized wet-method silica particles having an average particle diameter of 0.1-1.0 μm. The value of the ratio of the average particle diameter of the wet-method silica particles to the average particle diameter of the colloidal silica is 2.0-30.0. |
申请公布号 |
WO2015146941(A1) |
申请公布日期 |
2015.10.01 |
申请号 |
WO2015JP58818 |
申请日期 |
2015.03.24 |
申请人 |
YAMAGUCHI SEIKEN KOGYO CO., LTD. |
发明人 |
IWATA, TORU;SUGAWA, AKIRA |
分类号 |
C09K3/14;B24B37/00;C09G1/02;G11B5/84;H01L21/304 |
主分类号 |
C09K3/14 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|