发明名称 POLISHING AGENT COMPOSITION AND METHOD FOR POLISHING MAGNETIC DISK SUBSTRATE
摘要 Provided is a polishing agent composition which enables both the achievement of high polishing rate and the achievement of good surface smoothness at the same time without using alumina particles. A polishing agent composition which contains a colloidal silica having an average particle diameter of 5-200 nm and pulverized wet-method silica particles having an average particle diameter of 0.1-1.0 μm. The value of the ratio of the average particle diameter of the wet-method silica particles to the average particle diameter of the colloidal silica is 2.0-30.0.
申请公布号 WO2015146941(A1) 申请公布日期 2015.10.01
申请号 WO2015JP58818 申请日期 2015.03.24
申请人 YAMAGUCHI SEIKEN KOGYO CO., LTD. 发明人 IWATA, TORU;SUGAWA, AKIRA
分类号 C09K3/14;B24B37/00;C09G1/02;G11B5/84;H01L21/304 主分类号 C09K3/14
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