摘要 |
This composition for forming a cerium-doped PZT piezoelectric film contains the following: a PZT precursor containing the metal atoms that constitute a complex metal oxide; a diol; and polyvinylpyrrolidone or the like. Said composition contains a PZT precursor such that: the atomic proportions of the metals lead, cerium, zirconium, and titanium in the composition are 1.00 to 1.28, 0.005 to 0.05, 0.40 to 0.55, and 0.60 to 0.45, respectively; and the sum of the atomic proportion of zirconium and the atomic proportion of titanium is equal to 1. The oxide concentration of the PZT precursor as a proportion of the total mass of the composition is between 17% and 35%, inclusive; the diol constitutes between 16% and 56%, inclusive, of the total mass of the composition; and, in monomer-equivalent terms, there are 0.01 to 0.25 moles of the polyvinylpyrrolidone or the like per mole of the PZT precursor. |