| 发明名称 |
DUAL-PHASE INTERFEROMETRY FOR CHARGE MODULATION MAPPING IN ICS |
| 摘要 |
A dual-phase interferometric method and device for charge modulation mapping in integrated circuits provides significant improvement in signal to noise ratio over conventional detection configurations. The method and device can be used for failure analysis and testing of advanced technology IC chips for which high sensitivity in modulation mapping is required. |
| 申请公布号 |
US2015276864(A1) |
申请公布日期 |
2015.10.01 |
| 申请号 |
US201314433732 |
申请日期 |
2013.10.11 |
| 申请人 |
TRUSTEES OF BOSTON UNIVERSITY |
发明人 |
Yurt Abdulkadir;Unlu Selim M.;Goldberg Bennett B.;Ramsay Euan |
| 分类号 |
G01R31/311;G01B9/02;G01R31/28 |
主分类号 |
G01R31/311 |
| 代理机构 |
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代理人 |
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| 主权项 |
|
| 地址 |
Boston MA US |
