发明名称 |
INSPECTION OF MICROELECTRONIC DEVICES USING NEAR-INFRARED LIGHT |
摘要 |
Inspection of microelectronic devices is described using near infrared light. In one example, a dielectric material layer on a substrate is illuminated with a near infrared light beam. The substrate has at least one contact land, the dielectric material layer overlies at least a portion of the contact land, and the substrate has at least one via defined in the dielectric material layer, the via exposing at least a portion of the contact land. Reflected near infrared light is reflected from the substrate at a camera. The position of the via is determined relative to the contact land from the reflected light beam using an image processing device. |
申请公布号 |
US2015276621(A1) |
申请公布日期 |
2015.10.01 |
申请号 |
US201414229824 |
申请日期 |
2014.03.28 |
申请人 |
Zhang Liang W.;Zou Zhihua;Martin, III Osborne A.;Wiedmaier Robert F. |
发明人 |
Zhang Liang W.;Zou Zhihua;Martin, III Osborne A.;Wiedmaier Robert F. |
分类号 |
G01N21/95;H01L21/66;G01B11/27 |
主分类号 |
G01N21/95 |
代理机构 |
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代理人 |
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主权项 |
1. A method of alignment detection comprising:
illuminating a dielectric material layer on a substrate with a near infrared light beam, wherein the substrate has at least one contact land, the dielectric material layer overlying at least a portion of the contact land, the substrate having at least one via defined in the dielectric material layer, the via exposing at least a portion of the contact land; receiving a reflected near infrared light beam from the substrate at a camera; and determining the position of the via relative to the contact land from the reflected light beam using an image processing device. |
地址 |
Chandler AZ US |