发明名称 SENSOR ELEMENT, FORCE DETECTING DEVICE, ROBOT AND SENSOR DEVICE
摘要 A sensor element includes a piezoelectric substrate made of a trigonal single crystal and an electrode arranged on the piezoelectric substrate. The substrate surface of the piezoelectric substrate includes an electrical axis of crystal axes. An angle θ formed by the substrate surface and a plane including the electrical axis and an optical axis of the crystal axes is 0°<θ<20°.
申请公布号 US2015276513(A1) 申请公布日期 2015.10.01
申请号 US201514722248 申请日期 2015.05.27
申请人 Seiko Epson Corporation 发明人 KAWAI Hiroki
分类号 G01L1/16;G01L5/22;B25J9/16;H01L41/187;H01L41/113 主分类号 G01L1/16
代理机构 代理人
主权项 1. A robot comprising: a piezoelectric substrate including a trigonal single crystal having crystal axes; a first electrode on a first surface of the piezoelectric substrate; a second electrode on a second surface, the first and second surfaces being on opposite sides of the piezoelectric substrate; an arithmetic unit which detects an amount of electric charge induced in the first or second electrode and calculates a force applied to the piezoelectric substrate; a rotatable arm portion; and a hand portion supported on the arm portion via the piezoelectric substrate, the hand portion being adapted to grip an object; wherein the first surface of the piezoelectric substrate includes an electrical axis of the crystal axes, an angle θ between the first surface and a plane including the electrical axis and an optical axis of the crystal axes is 0°<θ<20°, and a material for the piezoelectric electric substrate is selected from the group consisting of langasite (La3Ga5SiO14), lithium niobate (LiNbO3) single crystal, lithium tantalite (LiTaO3) single crystal, gallium phosphate (GaPO4) single crystal, and lithium borate (Li2B4O7) single crystal.
地址 Tokyo JP
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