摘要 |
This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having one or more flexible support posts. In one aspect, the EMS device includes a substrate, a stationary electrode over the substrate, one or more flexible support posts over the substrate, and a movable electrode over the stationary electrode and supported by the one or more flexible support posts. The movable electrode is configured to move across a gap between the movable electrode and the stationary electrode upon electrostatic actuation, where the one or more flexible support posts include a first organic material and can be configured to compress to permit the movable electrode to move across the gap. |
申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC. |
发明人 |
HONG, JOHN HYUNCHUL;MA, JIAN JIM;WEN, BING;CHANG, TALLIS YOUNG;CHAN, EDWARD KEAT LEEM;HONG, BRANDON JOHN;LAVERY, KRISTOPHER ANDREW;PAN, YAOLING;KIM, CHEONHONG |