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发明名称
温度控制装置及试验系统
摘要
本发明要解决的问题是,在现有技术中,阀的数量增加,构成和控制变得复杂。;为了解决上述问题,本发明是一种温度控制装置,用以控制元件的温度,该温度控制装置具备:热交换部,其与前述元件之间进行热交换;主流路,其供流体流动;副流路,其供温度与在前述主流路中流动之流体的温度不同的流体流动;混合流路,其使来自前述主流路和前述副流路的流体合流并流向前述热交换部;及,流量调整部,其调整从前述副流路流向前述混合流路之流体相对于在前述主流路中流动之流体的混合量。
申请公布号
TW201537320
申请公布日期
2015.10.01
申请号
TW103132490
申请日期
2014.09.19
申请人
爱德万测试股份有限公司 ADVANTEST CORPORATION
发明人
佐佐木博孝 SASAKI, HIROTAKA;山下毅 YAMASHITA, TSUYOSHI;增田登 MASUDA, NOBORU
分类号
G05D23/13(2006.01)
主分类号
G05D23/13(2006.01)
代理机构
代理人
蔡坤财李世章
主权项
地址
日本 JP
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