发明名称 ANCHORED INTERCONNECT
摘要 An embodiment includes a semiconductor structure comprising: a backend portion including a plurality of metal layers between bottom and top metal layers; the top metal layer including a top metal layer portion having first and second opposing sidewall surfaces and a top surface that couples the sidewall surfaces to one another; an insulator layer directly contacting the top surface; and a via coupling a contact bump to the top metal layer portion; wherein a first vertical axis, orthogonal to a substrate coupled to the backend portion, intercepts the contact bump, the nitride layer, the via, and the top metal layer portion. Other embodiments are described herein.
申请公布号 WO2015147848(A1) 申请公布日期 2015.10.01
申请号 WO2014US32108 申请日期 2014.03.28
申请人 INTEL CORPORATION 发明人 KANG, JIHO;KOTHARI, HITEN;MONTAROU, CAROLE C.;YEOH, ANDREW W.
分类号 H01L23/48;H01L21/60 主分类号 H01L23/48
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