发明名称 |
TRANSFER JIG, LOADING METHOD, AND PURIFICATION PROCESS |
摘要 |
A transfer jig has a main body capable of housing a tubular first cylinder for collecting a vaporized organic material, and the main body housing the first cylinder is housed inside a tubular second cylinder of a purification apparatus. A loading method has: a step of housing, in the main body of the transfer jig, the tubular first cylinder for collecting a vaporized organic material; and a step of inserting and removing the transfer jig housing the first cylinder into and from the tubular second cylinder of the purification apparatus. |
申请公布号 |
WO2015146763(A1) |
申请公布日期 |
2015.10.01 |
申请号 |
WO2015JP58184 |
申请日期 |
2015.03.19 |
申请人 |
IDEMITSU KOSAN CO.,LTD. |
发明人 |
FUJIKAWA NOBUO;KADOI YASUNORI |
分类号 |
B01D7/02;B01D3/00;B01D7/00 |
主分类号 |
B01D7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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