发明名称 METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING ELEMENT
摘要 This invention provides a method for manufacturing an organic light emitting element in which damages to members constituting the organic light emitting element are suppressed and a protective layer with few defects is formed by performing cleaning with liquid containing water. The manufacturing method according to this invention is a method for manufacturing an organic light emitting element including a process of preparing a lower electrode, a process of forming an organic compound layer on the lower electrode, a process of forming an upper electrode on the organic compound layer; and a process of forming a first protective layer on the upper electrode, in which the method includes, after the process of forming the organic compound layer, a process of cleaning at least one of the organic compound layer, the upper electrode, and the first protective layer with liquid containing water.
申请公布号 US2015280175(A1) 申请公布日期 2015.10.01
申请号 US201514668660 申请日期 2015.03.25
申请人 CANON KABUSHIKI KAISHA 发明人 Ito Takayuki;Takaya Itaru;Mashimo Seiji;Ishizuya Koji;Kamatani Jun;Yamada Naoki;Kosuge Tetsuya;Miyashita Hirokazu
分类号 H01L51/56;H01L51/52;H01L51/00 主分类号 H01L51/56
代理机构 代理人
主权项 1. A method for manufacturing an organic light emitting element comprising: forming a lower electrode; forming an organic compound layer on the lower electrode; forming an upper electrode on the organic compound layer; forming a first protective layer on the upper electrode; and forming a second protective layer on the first protective layer wherein the method includes, after the formation of the organic compound layer, cleaning at least one of the organic compound layer, the upper electrode, and the first protective layer with liquid containing water.
地址 Tokyo JP