| 摘要 |
Provided are a method and a system by which rarefied helium gas is industrially and efficiently purified with small-scale equipment to a high degree. In each of the adsorption towers (2a, 2b, 2c) for concentration of a first pressure swing adsorption device (1), an adsorption step, a depressurization step, a desorption step, and a pressurization step are successively performed to adsorb impurity gases contained in the rarefied helium gas onto an adsorbent and to discharge concentrated helium gas, which has remained unadsorbed onto the adsorbent. A passageway for introducing the concentrated helium gas into each of the multiple adsorption towers (102a, 102b, 102c) for reconcentration of a second pressure swing adsorption device (101) is connected to a passageway for discharging the concentrated helium gas from the first pressure swing adsorption device (1). In each of the adsorption towers for reconcentration, an adsorption step, a depressurization step, a desorption step, and a pressurization step are successively performed to adsorb impurity gases contained in the concentrated helium gas onto an adsorbent and to discharge reconcentrated helium gas, which has remained unadsorbed onto the adsorbent. |
