发明名称 GERMANIUM TIN CHANNEL TRANSISTORS
摘要 Techniques related to transistors and integrated circuits having germanium tin, systems incorporating such transistors, and methods for forming them are discussed. Such transistors include a channel region that comprises a germanium tin portion of a fin such that the fin includes a buffer layer disposed over a substrate and the germanium tin portion disposed over the buffer layer.
申请公布号 WO2015147833(A1) 申请公布日期 2015.10.01
申请号 WO2014US32022 申请日期 2014.03.27
申请人 INTEL CORPORATION;PILLARISETTY, RAVI;LE, VAN;RACHMADY, WILLY;KOTLYAR, ROZA;RADOSVLJEVIC, MARKO;THEN, HAN WUI;DASGUPTA, SANSAPTAK;DEWEY, GILBERT;CHU-KUNG, BENJAMIN;KAVALIEROS, JACK 发明人 PILLARISETTY, RAVI;LE, VAN;RACHMADY, WILLY;KOTLYAR, ROZA;RADOSVLJEVIC, MARKO;THEN, HAN WUI;DASGUPTA, SANSAPTAK;DEWEY, GILBERT;CHU-KUNG, BENJAMIN;KAVALIEROS, JACK
分类号 H01L29/78;H01L27/11 主分类号 H01L29/78
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