发明名称 HEAT TREATMENT APPARATUS USING ELECTRON-BEAM
摘要 <p>The present invention relates to a heat treatment apparatus using an electron beam which includes a first electrode plate, a second electrode plate, a first protrusion, a second protrusion, and an opening part. The second electrode plate is arranged to be separated from the first electrode plate with a preset distance. The first protrusion is formed on the center of the first electrode plate to protrude to the second electrode plate and generates an electron in a space with the second electrode plate. The second protrusion is formed on both sides of the first protrusion to protrude to the second electrode plate and generates the electrons in a space with the second electrode plate. The length of the second protrusion is shorter than the length of the first protrusion. The opening part is formed on the second electrode plate and emits the electron generated between the first electrode plate and the second electrode plate to the outside with an electron beam type. The energy of the electron beam discharged from the first protrusion is larger than the energy of the electron beam discharged from the second protrusion.</p>
申请公布号 KR101555881(B1) 申请公布日期 2015.10.01
申请号 KR20140056724 申请日期 2014.05.12
申请人 发明人
分类号 H01L21/324;H01L21/263 主分类号 H01L21/324
代理机构 代理人
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