ELECTROLYTIC APPARATUS, SYSTEM AND METHOD FOR EFFICIENT PRODUCTION OF NITROGEN TRIFLUORIDE

摘要

PROBLEM TO BE SOLVED: To provide an electrolytic apparatus for production of nitrogen trifluoride without mixture with hydrogen generated at cathodes and without risks of explosion.SOLUTION: An electrolytic apparatus comprises an electrolytic cell 25 partitioned into anode 20 and cathode chambers 18 by one or more partition walls between each of the anode 20 and cathode chambers 18. Each anode chamber 17 comprises one or more anodes 20 comprising an inner surface and an outer surface, and each cathode chamber 18 comprises one or more cathodes 21. The anode 20 and cathode chambers 18 are configured such that one of the cathodes 21 is adjacent to the outer surface of the one or more anodes 20 and such that there is no cathode 21 adjacent to the inner surface 2 of the one or more anodes 20. The electrolytic apparatus also comprises: an anode gas outlet 11 for withdrawing gas; a cathode gas outlet for withdrawing gas from the cathode chamber 18; and heat transfer tubes 60 for circulating a heating or cooling medium for controlling electrolytes in the apparatus.