发明名称 MEASUREMENT INSTRUMENT AND MEASUREMENT METHOD
摘要 PROBLEM TO BE SOLVED: To perform accurate determination even in the case of a scale of a sample structure has a spatial resolution equal to or lower than that of a measurement instrument.SOLUTION: A measurement instrument 100 determines a substance constituting a sample 104 by using a terahertz wave and includes an irradiation unit 130 which irradiates the sample with the terahertz wave, a detection unit 107 which detects the terahertz wave transmitted through or reflected by the sample, a spectrum acquisition unit 108 which uses the detection result of the detection unit to acquire a measured spectrum, a structure acquisition unit 131 which acquires information relating to a scale of a structure of the sample, and a determination unit 132 which uses the measured spectrum and a plurality of spectra to determine a substance constituting the sample. The determination unit sets a frequency range of the measured spectrum for use in determining the substance of the sample, on the basis of the information.
申请公布号 JP2015172570(A) 申请公布日期 2015.10.01
申请号 JP20150020820 申请日期 2015.02.05
申请人 CANON INC 发明人 KUBOTA OICHI;YAMAGUCHI SAYURI
分类号 G01N21/3586 主分类号 G01N21/3586
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