| 摘要 |
This defect detecting device is provided with a workpiece holder (1) for holding a specimen under inspection. The workpiece holder (1) has an inspection table (11), a base (12) placed on a positioning surface (11a) of the inspection table (11), and a presser plate (13). When a specimen under inspection is arranged at a prescribed position (Pt) on the positioning surface (11a), the base (12) slides under the back of a slack portion (103) of the specimen under inspection. The presser plate (13) is a transparent presser plate designed such that at least a portion of the specimen under inspection, when arranged at the prescribed position (Pt), is pressed towards the inspection table (11). The presser plate (13) has a first flat plate portion (131) that, when arranged at a pressing position, faces the positioning surface (11a) of the inspection table (11) in close proximity thereto. The first flat plate portion (131) is provided with an opening (131a) that permits passage of the base (2) when the presser plate (13) is arranged at the pressing position. |
