发明名称 NON-CONTACT FLOATING CARRIER DEVICE, AND METHODS FOR SWITCHING CARRIAGE DIRECTION AND ADJUSTING CARRIAGE SPEED THEREOF
摘要 <p>PROBLEM TO BE SOLVED: To provide a non-contact floating carrier device of a simple device structure, carrying a carriage object in a non-contact floating state, using the revolving force of a swirl flow without an additional contact-type drive mechanism, and easily achieving a changeover of forward/backward movement and adjusting the carriage speed.SOLUTION: In a non-contact floating carrier device 100, the revolution directions of swirl flows Ra, Rb, which are respectively generated by a pair of right and left swirl flow formation units 130a, 130b, are mutually set to the same direction. Revolving force adjustment means (140) for adjusting the revolving force of the swirl flows are provided in the swirl flow formation units 130a, 130b, respectively, so as to arbitrarily change over the revolving force between a forward path object carriage state, in which the revolving force of a swirl flow, discharged from one of the pair of right and left swirl flow formation units 130a, 130b, is strengthened than the revolving force of a swirl flow discharged from the other, and a backward path object carriage state, in which the revolving force of the swirl flow, discharged from one of the pair of right and left swirl flow formation units 130a, 130b, is weakened than the revolving force of the swirl flow discharged from the other.</p>
申请公布号 JP2015173173(A) 申请公布日期 2015.10.01
申请号 JP20140048006 申请日期 2014.03.11
申请人 OILES IND CO LTD 发明人 SATO HIKARI;ITO AKIHIKO;YASUDA TAKAHIRO
分类号 H01L21/677 主分类号 H01L21/677
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