| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a multipoint moving system higher in moving efficiency than before and a multipoint processing system higher in processing efficiency than before.SOLUTION: A multipoint moving system for sequentially moving a moving table to a plurality of moving destinations, comprises: a management device holding a management data which includes at least coordinates indicating the plurality of moving destinations and an interference avoiding method for avoiding interference with an interference object at a time of moving the moving table to the moving destinations; and a controller controlling the moving table based on the management data.</p> |
