| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a flow control valve which maintains a degree of cleanliness of a fluid in a higher state by suppressing unexpected contact of a valve seat and a valve element or the like and maintains a fixed flow rate of the fluid.SOLUTION: In a flow control valve 10A, a first rod-like movable part 40 which moves back and forth together with a first diaphragm 30 is disposed in a second chamber 22 and a second rod-like movable part 50 which moves back and forth together with a second diaphragm 35, is disposed in a fourth chamber 27. An intersection angle of the first and second rod-like movable parts in a length direction is set smaller than 180°, and the first and second rod-like movable parts are engaged with each other. The forward/backward movement of the first diaphragm and the second diaphragm generated by pressure fluctuation before and behind a throttle part 15 is transmitted to the mutual diaphragms via the engagement of the first and second rod-like movable parts. Thus, a valve element 38 is moved back and forth relatively to a valve seat 16 by moving the first diaphragm and the second diaphragm back and forth, and a flow rate of a fluid to be controlled is kept constant.</p> |
