INTERFERENCE OBSERVATION DEVICE AND INTERFERENCE OBSERVATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an interference observation device and interference observation method capable of simultaneously achieving both of improvement of the lateral resolution and extension of the image depth.SOLUTION: The interference observation device includes: an interferometer for generating interference light by interfering the measuring light having a plurality of wavelengths having passed through a measurement arm with reference light having a plurality of wavelengths having passed through a reference arm; a detection unit for converting the interference light into scattering potential information of an object; a scan unit for scanning the reference surface of the object at a collecting point of the measuring light by an objective lens disposed in the measurement arm; and off-set units 24 and 25 for providing different optical length off-sets between N types of measuring light individually passing through N different partial openings of the objective lens.