HEAT TREATMENT DEVICE

摘要

[Problem] To achieve a reduction in the size of a heat treatment device which performs heat treatment on a plurality of substrates in one batch using electromagnetic induction heating. [Solution] A heat treatment device for performing heat treatment on a plurality of substrates disposed inside a treatment container (1) is provided with a substrate holding part (3) for disposing and heating substrates inside the treatment container (1) and whereon a plurality of susceptors (Sn), each comprising for instance isotropic graphite having a heat conductivity of 70 W/m·K or greater, are arranged and held into shelf form. In addition, outside the treatment container (1) and on the side of the substrate holding part (3), a planar induction coil (42) is provided for forming an oscillating magnetic field inside the treatment container (1) and heating the susceptors (Sn). The planar induction coil (42) is comprised of coil wire (43) which is wound along a surface that faces the side of the substrate holding part (3), so the space occupied by the planar induction coil (42) becomes smaller and therefore the heat treatment device can be reduced in size compared to prior art devices.