| 摘要 |
本发明提供一种抑制对接合工具侧的影响的线张力器。于线张力器36形成供线28贯通的线通路38。线通路38包含：流入口42，供压缩气体流入；第1排出口44，设置于较流入口42靠上侧，且排出压缩气体；第1缩流部46，设置于较流入口42靠上侧，且使线通路38内的面积缩小；第2缩流部48，设置于较流入口42靠下侧，且使线通路38内的面积缩小；以及第3缩流部58，设置于较第2缩流部48靠接合工具侧，且使流向接合工具侧的压缩气体流缩小。进而，线通路38包含第2排出口50，该第2排出口50设置于较第2缩流部48靠下侧，且排出压缩气体。藉此，可对线28赋予张力，并且可使自线通路38的下端部38b排出的压缩空气大幅地减少。; a first outlet 44 disposed at a more upper side than the inlet 42 and exhausting the compressing gas; a first flow limit portion 46 disposed at a more upper side than the inlet 42 and decreasing an area in the wire route 38; a second flow limit portion 48 disposed at a more lower side than the inlet 42 and decreasing an area in the wire route 38; and a third flow limit portion 58 disposed closer to the bonding tool side than the second flow limit portion 48 and decreasing the flow of the compressing gas toward the bonding tool side. Further, the wire route 38 includes a second outlet 50, wherein the second outlet 50 is disposed at a more lower side than the second flow limit portion 48 and exhausts the compressing gas. Thus, tension can be applied to the wire 28, and the compressing gas exhausted from a lower end portion 38b of the wire route 38 can be largely decreased. |
