| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a defect detecting device which efficiently detects at a high speed a surface defect generating difference in surface roughness, by using the simplest processing possible. <P>SOLUTION: A defect detecting device 1 includes an array-shaped light source 3 irradiating an inspection object T with irradiation light, and imaging means 2 for detecting reflection light which is the irradiation light reflected on a surface of the inspection object T; and detects a surface defect D existing on the surface of the inspection object T and having difference in roughness from a normal surface. The array-shaped light source 3 emits at least three kinds of the irradiation light having different characteristics. The imaging means 2 is disposed so as to make the light-receiving amount of specified one or two kinds of at least the three kinds of the irradiation light reflected by the surface defect D larger than the light-receiving amount of the rest of the irradiation light, when the surface defect D is in a mirror surface shape. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
