| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a beam profile measuring instrument capable of performing high-accuracy measurement. <P>SOLUTION: This beam profile measuring instrument comprises a light intensity distribution measuring instrument measuring light intensity distribution on a light receiving surface, and a lens optical system with a light beam passing through a first surface coming thereinto. The optical system enlarges or reduces the size of a cross section of the light beam in a first direction on the first surface at a first magnification while enlarging or reducing the size of the cross section in a second direction crossing the first direction at a second magnification different from the first magnification to form an image of the cross section on the receiving surface of the measuring instrument. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
