| 摘要 |
PROBLEM TO BE SOLVED: To prevent a crack from being generated in a piezoelectric layer in a cavity circumferential edge. SOLUTION: The first electrode 46 has a main body part 46a covering the substantial whole of an area of a recess 43, and the main body part 46a includes a cut-out part 46c. The piezoelectric layer 47 has a main body part 47a having a diameter smaller than the recess 43, the whole thereof comes within a range of the recess area, and the substantial whole of the main body part 47a excepting a portion corresponding to the cut-out part 46c is layered onto the first electrode 46. An auxiliary electrode 48 is extended from an outside of the recess area up to an inside thereof, and one part thereof is positioned in an inside of the cut-out part 46c of the first electrode 46 to support one part of the piezoelectric layer 47. The second electrode 49 has a main body part 49a layered onto the piezoelectric layer 47, and an extended part 49b extended therefrom and connected to the auxiliary electrode 48 in the inside of the recess area. COPYRIGHT: (C)2008,JPO&INPIT |
