摘要 |
The invention relates to a component operating with guided bulk acoustic waves, GBAW, with a layer system that comprises a piezoelectric layer (PS 1 ) and a first metal layer (ME 1 ) arranged thereon. The layer system forms a waveguide in which the guided bulk acoustic wave is guided in the lateral direction. The component comprises two resonators acoustically coupled to one another and electrically isolated from one another. The corresponding resonator comprises an electrode (A), formed in a metal layer (ME 1 ), with electrode structures periodically arranged in the wave-propagation direction.
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