发明名称 Component That Operates Using Acoustic Waves And Method For Producing Said Component
摘要 The invention relates to a component operating with guided bulk acoustic waves, GBAW, with a layer system that comprises a piezoelectric layer (PS 1 ) and a first metal layer (ME 1 ) arranged thereon. The layer system forms a waveguide in which the guided bulk acoustic wave is guided in the lateral direction. The component comprises two resonators acoustically coupled to one another and electrically isolated from one another. The corresponding resonator comprises an electrode (A), formed in a metal layer (ME 1 ), with electrode structures periodically arranged in the wave-propagation direction.
申请公布号 US2008094150(A1) 申请公布日期 2008.04.24
申请号 US20050576981 申请日期 2005.09.26
申请人 EPCOS AG 发明人 MEISTER VEIT;RUILE WERNER
分类号 H03H9/25;H01L41/08;H01L41/22;H03H9/205;H03H9/24 主分类号 H03H9/25
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